The Prior Scientific H105NL/2 6" travel motorized stage is for use with the Nikon LV series of microscopes and the stage can be compatible with Nikon NIS Software if the appropriate package is purchased. This motorized stage was designed for 6-inch semiconductor wafer imaging. The stage features a notch at the rear to enable the full travel range to be achieved on these smaller microscopes, enabling high precision motorized control otherwise only available on larger systems. A variety of sample holders are available below.
Intelligent Scanning Technology (IST) allows each stage to be pre-programmed with a unique set of operating characteristics particular to that stage to ensure optimum performance and allows the ProScan III controller to make any required adjustments to maintain superior orthogonally and metric accuracy.
Motorized Stage Specifications:
- Travel: 154mm x 154mm XY travel (6" x 6")
- Motor Type: Stepper: 200 SPR
- Resolution: 0.04µm
- XY Repeatability: +/-0.7µm open loop
- Minimum Step Size: 0.04µm
- Metric Accuracy (per mm of travel): 0.7µm (Requires use of ProScan III Controller)
- Maximum Velocity: 60mm/second
- Weight: 5 kg (11 lbs)
- Max Load Capacity: 20 kg (44 lbs)
- Warranty: 5 Years
View the ProScan H105NL/2 Motorized Stage Brochure
NOTE: This item is not returnable.
Prior Scientific Part #s H105NL/2
