M68 NIR Semiconductor Microscope

The Fein Optic M68 NIR semiconductor microscope has NIR objectives and the option to add a motorized stage.

• Objective Lenses: Includes the following Infinity Corrected Plan Semi Apochromat NIR lenses:
  • Plan Semi Apo NIR 5x, NA = 0.15, WD = 19.5mm
  • Plan Semi Apo NIR 10x, NA = 0.30, WD = 12.2mm
  • Plan Semi Apo NIR 20x, NA = 0.45, WD = 7.3mm
  • Plan Semi Apo NIR 50x, NA = 0.70, WD = 2.7mm
• Viewing Head: Has near infrared with 30º tilting trinocular upright and erect viewing head. Beam splitting ratio: 100:0 or 0:100. Interpupillary distance adjustable from 50mm-76mm.
• Eyepieces: Widefield focusing PL10x/23mm eyepieces, with reticle retaining ring for a 26mm reticle.
• Frame: Has sturdy metal frame for brightfield/ darkfield reflected light. Shock proof frame features front located control buttons to operate the motorized nosepiece, illumination adjustments, and aperture diaphragm adjustments.
• Focusing: Low position coaxial focus mechanism, coarse range: 35mm, fine precision: 0.001mm. Upper limit and tension adjustment. Built-in 100-240V wide voltage system.
• Nosepiece: Motorized sextuple nosepiece
• Total Magnification: 50x, 100x, 200, 500x
• Specimen Stage & Stage components: Select when ordering from a non-motorized or a motorized stage.
  • Non motorized manual stage has an X/Y travel range of 210mm x 210mm and includes 8" wafer holder.
  • The motorized stage has the following specifications:
    • Motorized stage has an X/Y travel range of 255mm x 216mm. Read the stage specifications here.
    • Includes rotating wafer chuck that accommodates 200mm wafers.
    • Includes focus drive for precise and repeatable Z-axis focusing.
    • Includes XY joystick control unit for controlling motorized stage.
    • Motorized stage controller allows stage to travel up to 300mm/s.
    • Motorized stage controller can control steps from 0.01µm in the X/Y direction and those in the Z direction from 0.002µm.
• Illumination: 150W halogen illuminator has 36" fiber optical light guide and 3 extra bulbs for enhanced NIR spectral output. Has collimating adapter for fiber light guide.
• Polarization: Includes polarizer for reflected light and 360º rotatable analyzer.
• NIR Filters: Includes 3 band pass filters with wavelengths of 1100nm, 1200nm, and 1300nm.
• Size: 683mm (26.89") D x 519mm (20.43") H x 539mm (21.22") W

View the M68 Microscope Brochure