M50-12 Advanced Semiconductor Microscope

The Fein Optic M50-12 advanced semiconductor microscope is tailored for demanding inspection, metrology, and analysis of Semiconductor and MEMS devices in the wafer fabrication plant. Providing observation in brightfield, darkfield, polarization, and DIC methods, outstanding optical performance and crisp images, which generate reliable and reproducible results. The M50-12 supports up to a 300mm diameter wafer and 17 inches of FPD (Flat Panel Display).

• Objective Lenses: Infinity Corrected Brightfield/Darkfield Plan Semi Apochromat lenses have the following specifications:
  • BD Semi APO 5x, NA = 0.15, WD = 13.5mm
  • BD Semi APO 10x, NA = 0.30, WD = 9.0mm
  • BD Semi APO 20x, NA = 0.50, WD = 2.5mm
  • BD Semi APO 50x, NA = 0.80, WD = 1.0mm
• Viewing Head: Ergonomic tilting Super Widefield trinocular viewing head is adjustable from 5-35º and features upright and erect image. Beam splitting ratio: 100:0 or 20:80. Interpupillary distance adjustable from 50mm-76mm.
• Eyepieces: Super Widefield High eyepoint WF PL10x/25mm, with reticle retaining ring for a 27mm reticle.
• Frame: Sturdy metal frame with reflected light. Shock proof frame features front located control buttons to operate the motorized nosepiece, illumination adjustments, and aperture diaphragm adjustments.
• Focusing: Low position coaxial focus mechanism, coarse range: 35mm, fine precision: 0.001mm. Upper limit and tension adjustment. Built-in 100-240V wide voltage system.
• Nosepiece: Motorized brightfield /darkfield sextuple nosepiece with DIC slot.
• Total Magnification: 50x, 100x, 200, 500x
• Specimen Stage: Manual stage with 356mm x 305mm X/Y travel. Includes 12" wafer holder.
• Illumination: 10W LED Brightfield/Darkfield reflected illuminator, electronic variable aperture and field diaphragm, center adjustable. Has switch for changing between Brightfield/Darkfield and slots for filters and polarizing kit.
• Polarization: Includes polarizer for reflected light and 360º rotatable analyzer.
• Size: 809mm (31.85") D x 574mm (22.59") H x 718mm (28.26") W

View the M50-12 Microscope Brochure