XY Piezo Nanopositioning Super Invar Stage

The NPS-XY-100A Nanopositioning stage is a piezo scanned flexure-guided stage with integrated capacitance sensors capable of sub-nanometer resolution and reproducibility. The stage is made of Super Invar, a material that minimizes thermal expansion. The unique isostatic mounting system ensures that stresses from mounting the stage are properly relieved, and the center of the stage is the coordinate reference point.

Applications for the NPS-XY-100A Nanopositioning stage include atomic force microscopy (AFM), scanning probe microscopy (SPM), and near-field scanning optical microscopy (NSOM).

The NPS-XY-100A super invar two axis 100µm x 100µm stage is made of super invar construction (CTE 0.3ppm K-1) which minimizes thermal drift, on a nanometer scale this is very important. With 3 point kinematic mounts.

Stage Specifications:

• Axis: XY
• Range: 110µm XY
• Position Noise: 0.2nm
• Repeatability: 0.6nm
• Linearity: 0.005%
• Step Settle: 15ms
• Material: Super Invar
• Size: 100mm L x 100mm W x 23mm H
• Suggested controller: Prior NPC-D-6330

View the NPS XY Piezo Stage Super Invar Datasheet.

NOTE: This item is not returnable.

Prior Part # QGNPS-XY-100A