Wafer Piezo Z Stage 300mm High Vacuum Compatible with Controller

The WP120A low profile, high-load Z stage for 12" (300mm) wafers provides millisecond response times and the high bandwidth make this wafer positioning system ideal for applications where high throughput is essential. The stage is designed to hold 12" wafers and delivers exceptional performance with loads of up to 8kg (17.6 lbs) suitable for heavy wafer chucks. This vacuum compatible version is ideal for use in a vacuum chamber of an electron microscope.

Applications include wafer and mask inspection, electron microscopes SEM / TEM, interferometry, metrology, microscopy, materials inspection, and mirror positioning.

Z Stage Specifications:

• Open Loop Range: 140µm
• Platform Size: 350mm Diameter (13.8")
• Position Noise: 1.2nm
• Linearity: 0.1%
• Repeatability: 5.5nm
• Step Settle: 9ms
• Material: Aluminum/Stainless
• Adapter: Includes QGWPADAPT1 H112 to WP120A Adapter Plate Kit
• Wafer Chuck: Includes 150, 200, and 300mm wafer chuck (vacuum hold version optional - select when ordering)
• High Vacuum: This model is high vacuum compatible.
• Dimensions: 375mm L x 375mm W x 30mm H
• Weight: 5.8g (12.8 lbs)

NPC-D-6110 Controller Specifications:

• Interfacing: Analog command input and position output for compatibility with existing systems. Digital commands over USB for maximum accuracy with a DLL interface for customer software.
• Cooling: Convection cooled, temp controlled fans
• Compatibility: Queensgate Nanobench, Micro-Manager, Metamorph, Elements via RS232C and other software using DLL interface. Can be connected to Prior ProScan III for integrated fine z-control.
• Controller Box Dimensions: 318mm x 240mm x 90mm
• Weight: 3kg

View the WP120A Wafer Piezo Z Stage Datasheet

View the Prior Scientific NanoScan NPC-D-6000 Series Controller Datasheet.

NOTE: This item is not returnable.

Prior Part # QGWP120A-UHV-D1, QGWPADAPT1, QGWP30, QGWP30V