PAX-It Critical Dimension Metrology Module

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The PAX-It Critical Dimension Metrology Module is designed to be used along with PAX-It's Image Analysis Software to set parameters and perform repeated measure…

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SKU: CD

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The PAX-It Critical Dimension Metrology Module is designed to be used along with PAX-It's Image Analysis Software to set parameters and perform repeated measurements on PAXcam images.

  • Critical Dimension Module Allows users to perform fast and repeatable measurements by setting up user-specified parameters for images. 
    • Measurements can be set for inside or outside edges of samples.
    • Targets such as % threshold can be specified.
    • Different aspects of samples can be measured repeatedly.
  • Bundling Pairing the Critical Dimension Metrology Module with other PAX-It modules such as the Motorized Stage and Scripting Modules allows users to create fully automated workflows.
  • Data Storage and Reporting Data can be exported automatically, or full reports can be generated in Microsoft Word or Excel.
  • Warranty 1 year

Note: Image Analysis Software is required in addition to the Critical Dimension Metrology Module for the tool to work.

PAXcam part number: CD

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Description

The PAX-It Critical Dimension Metrology Module is designed to be used along with PAX-It's Image Analysis Software to set parameters and perform repeated measurements on PAXcam images.

  • Critical Dimension Module Allows users to perform fast and repeatable measurements by setting up user-specified parameters for images. 
    • Measurements can be set for inside or outside edges of samples.
    • Targets such as % threshold can be specified.
    • Different aspects of samples can be measured repeatedly.
  • Bundling Pairing the Critical Dimension Metrology Module with other PAX-It modules such as the Motorized Stage and Scripting Modules allows users to create fully automated workflows.
  • Data Storage and Reporting Data can be exported automatically, or full reports can be generated in Microsoft Word or Excel.
  • Warranty 1 year

Note: Image Analysis Software is required in addition to the Critical Dimension Metrology Module for the tool to work.

PAXcam part number: CD

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