Wafer Inspection Digital Microscope
Opto particle standard normal offers multiple objects of various sizes and three fields with point grids of different resolution to determine optical distortion. The smallest object is 5 µm in size. Two scale bars in X and Y direction are in the corner of the target for calibration of resolution.
View the Opto Particle Standard Normal datasheet.
Opto Part # = 043-102302-72, 043-102302-75
NOTE: This item is not returnable.
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