M50-12 Advanced Semiconductor Motorized Stage Microscope
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M50-12 Advanced Semiconductor Motorized Stage Microscope
The Fein Optic M50-12 advanced semiconductor microscope is tailored for demanding inspection, metrology, and analysis of Semiconductor and MEMS devices in the w…
SKU:
M50-12-MS
Wafer Size:
12" Wafers
Microscope Features:
Motorized Stage
Please contact Microscope World for a custom quote for this item.
The Fein Optic M50-12 advanced semiconductor microscope is tailored for demanding inspection, metrology, and analysis of Semiconductor and MEMS devices in the wafer fabrication plant. Providing observation in brightfield, darkfield, polarization, and DIC methods, outstanding optical performance and crisp images, which generate reliable and reproducible results. This M50-12-MS system includes a motorized stage.
- Objective Lenses: Infinity Corrected Brightfield/Darkfield Plan Semi Apochromat lenses have the following specifications:
- BD Semi APO 5x, NA = 0.15, WD = 13.5mm
- BD Semi APO 10x, NA = 0.30, WD = 9.0mm
- BD Semi APO 20x, NA = 0.50, WD = 2.5mm
- BD Semi APO 50x, NA = 0.80, WD = 1.0mm
- BD Semi APO 100x, NA = 0.90, WD = 1.0mm
- Viewing Head: Ergonomic tilting super widefield trinocular viewing head is adjustable from 5-35º and features upright and erect image. Beam splitting ratio: 100:0 or 20:80. Interpupillary distance adjustable from 50mm-76mm.
- Eyepieces: Super Widefield High eyepoint WF PL10x/25mm, with reticle retaining ring for a 27mm reticle.
- Frame: Sturdy metal frame with Reflected light. Shock proof frame features front located control buttons to operate the motorized nosepiece, illumination adjustments, and aperture diaphragm adjustments.
- Focusing: Low position coaxial focus mechanism, coarse range: 35mm, fine precision: 0.001mm. Upper limit and tension adjustment. Built-in 100-240V wide voltage system.
- Nosepiece: Motorized brightfield /darkfield sextuple nosepiece with DIC slot.
- Total Magnification: 50x, 100x, 200, 500x, 1000x
- Specimen Stage:
- Motorized stage has an X/Y travel range of 302mm x 302mm. Read the stage specifications here.
- Includes the Proscan III controller, which controls the stage.
- Includes rotating wafer chuck that accommodates 300mm wafers.
- Includes focus drive for precise and repeatable Z-axis focusing.
- Includes XY joystick control unit for controlling motorized stage.
- Illumination: 10W LED brightfield/ darkfield reflected illuminator, electronic variable aperture and field diaphragm, center adjustable. Has switch for changing between brightfield/ darkfield and slots for filters and polarizing kit.
- Polarization: Includes polarizer for reflected light and 360º rotatable analyzer.
- Size: 809mm (31.85") D x 574mm (22.59") H x 718mm (28.26") W
View the M50-12 Microscope Brochure
Description
The Fein Optic M50-12 advanced semiconductor microscope is tailored for demanding inspection, metrology, and analysis of Semiconductor and MEMS devices in the wafer fabrication plant. Providing observation in brightfield, darkfield, polarization, and DIC methods, outstanding optical performance and crisp images, which generate reliable and reproducible results. This M50-12-MS system includes a motorized stage.
- Objective Lenses: Infinity Corrected Brightfield/Darkfield Plan Semi Apochromat lenses have the following specifications:
- BD Semi APO 5x, NA = 0.15, WD = 13.5mm
- BD Semi APO 10x, NA = 0.30, WD = 9.0mm
- BD Semi APO 20x, NA = 0.50, WD = 2.5mm
- BD Semi APO 50x, NA = 0.80, WD = 1.0mm
- BD Semi APO 100x, NA = 0.90, WD = 1.0mm
- Viewing Head: Ergonomic tilting super widefield trinocular viewing head is adjustable from 5-35º and features upright and erect image. Beam splitting ratio: 100:0 or 20:80. Interpupillary distance adjustable from 50mm-76mm.
- Eyepieces: Super Widefield High eyepoint WF PL10x/25mm, with reticle retaining ring for a 27mm reticle.
- Frame: Sturdy metal frame with Reflected light. Shock proof frame features front located control buttons to operate the motorized nosepiece, illumination adjustments, and aperture diaphragm adjustments.
- Focusing: Low position coaxial focus mechanism, coarse range: 35mm, fine precision: 0.001mm. Upper limit and tension adjustment. Built-in 100-240V wide voltage system.
- Nosepiece: Motorized brightfield /darkfield sextuple nosepiece with DIC slot.
- Total Magnification: 50x, 100x, 200, 500x, 1000x
- Specimen Stage:
- Motorized stage has an X/Y travel range of 302mm x 302mm. Read the stage specifications here.
- Includes the Proscan III controller, which controls the stage.
- Includes rotating wafer chuck that accommodates 300mm wafers.
- Includes focus drive for precise and repeatable Z-axis focusing.
- Includes XY joystick control unit for controlling motorized stage.
- Illumination: 10W LED brightfield/ darkfield reflected illuminator, electronic variable aperture and field diaphragm, center adjustable. Has switch for changing between brightfield/ darkfield and slots for filters and polarizing kit.
- Polarization: Includes polarizer for reflected light and 360º rotatable analyzer.
- Size: 809mm (31.85") D x 574mm (22.59") H x 718mm (28.26") W
View the M50-12 Microscope Brochure
