Fein Optic M20-12 Advanced Semiconductor Microscope

The Fein Optic M50-12 advanced semiconductor microscope is tailored for demanding inspection, metrology, and analysis of Semiconductor and MEMS devices in the wafer fabrication plant. Providing observation in brightfield, darkfield, polarization, and DIC methods, outstanding optical performance and crisp images, which generate reliable and reproducible results. The M50-12 supports up to a 300mm diameter wafer and 17 inches of FPD (Flat Panel Display). Please contact Microscope World for a quote or further information.

Objective Lenses: Infinity Corrected Optical System objective lenses options:  

• Infinity Corrected LWD Plan Achromat Brightfield/Darkfield, DIC
  • 5x, NA 0.15; WD 9.0mm
  • 10x, NA 0.3; WD 9.0mm
  • 20x, NA 0.45; WD 3.4mm
  • 50x, NA 0.55; WD 7.5mm
  • 100x, NA 0.80; WD 2.1mm
• Infinity Corrected Brightfield/Darkfield Plan Semi Apochromat
  • 5x, NA 0.15; WD 13.5mm
  • 10x, NA 0.30; WD 9.0mm
  • 20x, NA 0.50; WD 2.5mm
  • 50x, NA 0.80; WD 1.0mm
  • 100x, NA 0.90; WD 1.0mm
• Infinity Corrected LWD Brightfield/Darkfield Plan Semi Apochromat
  • 20x, NA 0.40; WD 8.5mm
  • 50x, NA 0.55; WD 7.5mm
  • 50x, NA 0.55; WD 10.6mm
  • 100x, NA 0.80; WD 2.1mm
  • 100x, NA 0.80; WD 3.5mm

Viewing Head: Ergonomic tilting Super Widefield trinocular viewing head is adjustable from 5-35º and features upright and erect image. Beam splitting ratio: 100:0 or 0:100. Optional 3-position beamsplitter with 100% - 80% / 20% - 100%  Interpupillary distance adjustable from 50mm-76mm.
Eyepieces: Super Widefield High eyepoint WF PL10x/25mm, with reticle retaining ring for a 27mm reticle.
Frame: Sturdy metal frame with model options for Reflected light or Reflected/Transmitted light. Shock proof frame features front located control buttons to operate the motorized nosepiece, illumination adjustments, and aperture diaphragm adjustments.
Focusing: Low position coaxial focus mechanism, coarse range: 35mm, fine precision: 0.001mm. Upper limit and tension adjustment. Built-in 100-240V wide voltage system. Laser Tracking Autofocus option available upon request.  
Nosepiece: Motorized brightfield /darkfield sextuple nosepiece with DIC slot.
Total Magnification: 50x, 100x, 200, 500x, 1000x.
Specimen Stage Options: 

• Manual 305mm x 305mm
  
• Motorized 302mm x 302mm
  
• 12" wafer holder

Illumination: 10W LED Brightfield/Darfield reflected illuminator, electronic variable aperture and field diaphragm, center adjustable; switch for changing between Brightfield/Darkfield; slots for filters and polarizing kit.
Filters & Attachments: Polarizing kit, Interference filters, DIC prism, IF550 Yellow Interference Filter for Photoresist inspection. 
Size: 809mm (31.85") D x 574mm (22.59") H x 718mm (28.26") W

View the M50-12 Microscope Brochure