Fein Optic M68 Advanced Semiconductor Microscope

The Fein Optic M68 advanced semiconductor microscope is tailored for demanding inspection, metrology, and analysis of Semiconductor and MEMs devices in the wafer fabrication process. Providing observation in brightfield, darkfield, polarization, and DIC methods, outstanding optical performance and crisp images, which generate reliable and reproducible results. The M68 supports up to a 200mm diameter wafer and 11 inches / 279.4mm of FPD (Flat Panel Display). Please contact Microscope World for a quote or further information.

Objective Lenses: Infinity Corrected Optical System objective lenses options:  

• Infinity Corrected LWD Plan Achromat Brightfield/Darkfield, DIC
  • 5x, NA 0.15; WD 9.0mm
  • 10x, NA 0.3; WD 9.0mm
  • 20x, NA 0.45; WD 3.4mm
  • 50x, NA 0.55; WD 7.5mm
  • 100x, NA 0.80; WD 2.1mm
• Infinity Corrected Brightfield/Darkfield Plan Semi Apochromat
  • 5x, NA 0.15; WD 13.5mm
  • 10x, NA 0.30; WD 9.0mm
  • 20x, NA 0.50; WD 2.5mm
  • 50x, NA 0.80; WD 1.0mm
  • 100x, NA 0.90; WD 1.0mm
• Infinity Corrected LWD Brightfield/Darkfield Plan Semi Apochromat
  • 20x, NA 0.40; WD 8.5mm
  • 50x, NA 0.55; WD 7.5mm
  • 50x, NA 0.55; WD 10.6mm
  • 100x, NA 0.80; WD 2.1mm
  • 100x, NA 0.80; WD 3.5mm

Viewing Head: Ergonomic tilting trinocular upright and erect viewing head is adjustable from 5-35º. Beam splitting ratio: 100:0 or 0:100. Optional 3-position beamsplitter with 100% - 80% / 20% - 100%  Interpupillary distance adjustable from 50mm-76mm.
Eyepieces: High eyepoint WF PL10x/23mm, with reticle retaining ring for a 26mm reticle.
Frame: Sturdy metal frame with model options for Reflected light or Reflected/Transmitted light. Shock proof frame features front located control buttons to operate the motorized nosepiece, illumination adjustments, and aperture diaphragm adjustments.
Focusing: Low position coaxial focus mechanism, coarse range: 35mm, fine precision: 0.001mm. Upper limit and tension adjustment. Built-in 100-240V wide voltage system.
Nosepiece: Motorized brightfield /darkfield sextuple nosepiece with DIC slot.
Total Magnification: 50x, 100x, 200, 500x, 1000x.
Specimen Stage Options: 

• Manual 158mm x 158mm
• Manual 210mm x 210mm
• Motorized 154mm x 154mm
• Motorized 255mm x 215mm
• 6" and 8" wafer holder

Illumination: 10W LED Brightfield/Darkfield reflected illuminator, electronic variable aperture and field diaphragm, center adjustable; Brightfield/Darkfield selector; slots for filters and polarizing kit.
Filters & Attachments: Polarizing kit, Interference filters, DIC prism, IF550 Yellow Interference Filter for Photoresist inspection.
Size: 683mm (26.89") D x 519mm (20.43") H x 539mm (21.22") W

View the M68 Microscope Brochure