Fein Optic M46 Semiconductor Wafer Inspection Microscope

The Fein Optic M46 metallurgical brightfield microscope is designed for critical dimension metrology. It features a large 6" stage providing room for viewing semiconductors, wafers, and slice substrates. This inspection microscope provides brightfield, darkfield, polarization and DIC contrast microscopy. Multiple objective lens sets are available. Wafer fixtures, paddles, vacuum pucks, and rotators can be quoted to address your specific requirements.  Please contact Microscope World for a quote or further information.

Objective Lenses: Infinity Corrected Optical System objective lenses options:  

• Infinity Corrected LWD Brightfield Plan Achromat 5x, 10x, 20x, 50x, 100x.
• Infinity Corrected High Resolution Brightfield Semi Apo 5x, 10x, 20x, 50x, 100x.
• Infinity Corrected LWD BD Plan Achromat  5x, 10, 20x, 50x, 100x.
• Infinity Corrected High Resolution BD Plan Achromat 5x, 10x, 20x, 50x. 100x.
• Infinity Corrected BD Plan Achromat 5x, 10x, 20x, 50x, 100x.

Viewing Head: 30º Inclined trinocular viewing head, erect image. Splitting ration: 100:0 or 0:100. Interpupillary distance adjustable from 50mm-76mm.
Eyepieces: High eyepoint WF PL10x/22mm, with reticle retaining ring for a 26mm reticle.
Frame: Reflected light frame with coaxial coarse and fine focus adjustment. Coarse distance 33mm, fine precision 0.001mm, with tension adjustment and upper limit stop.
Nosepiece: Quintuple brightfield /darkfield nosepiece with DIC slot.
Total Magnification: 50x, 100x, 200, 500x, 1000x.
Specimen Stage:
M46-RF: 6" three layer mechanical stage with low position coaxial adjustment. Moving range: 158mmx158mm. Clutch handle for quick movement and glass plate for reflected use.
M46-TRF: 6" three layer mechanical stage with low position coaxial adjustment. Moving range: 100mm x 100mm. Clutch handle for quick movement and glass plate for reflected/transmitted use.
Illumination:
M46-RF: 12v/100w halogen BD reflected illuminator with electronic variable aperture and field diaphragm, center adjustable with switch for changing from brightfield to darkfield. Slots for filters and polarizing kit.
M46-TRF:  12v/100w halogen BD reflected illuminator with electronic variable aperture and field diaphragm, center adjustable with switch for changing from brightfield to darkfield. Slots for filters and polarizing kit. Transmitted 5W LED illumination, brightness adjustable.
Condenser:
M46-RF: No condenser included.
M46-TRF: NA 0.50 N.A. condenser with iris diaphragm.
Polarization: Analyzer with rotatable polarizer.
Focusing: Low position coaxial focus mechanism, coarse range: 33mm, fine precision: 0.001mm. Upper limit and tension adjustment.
Size: 523mm (20.59") D x 467.3mm (18.39") H x 465mm (18.30") W

View the M46 brochure.
View the M46 datasheet.
View the M46 manual.